Please use this identifier to cite or link to this item:
https://hdl.handle.net/20.500.11779/1494
Title: | Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon Mems Resonators |
Authors: | Zhao, Chun Mustafazade, Arif Pandit, Milind Seshia A, Ashwin Sobreviela, Guillermo Zou, Xudong |
Keywords: | Semiconductor device measurement Resonators Silicon mems Frequency measurement Temperature sensors Resonant frequency Silicon Noise processes Temperature measurement Pressure dependence Temperature dependence |
Publisher: | IEEE |
Source: | Pandit, M., Mustafazade, A., Sobreviela, G., Zhao, C., Zou, X., & Seshia, A. A. (21 May 2021). Experimental Observation of Temperature and Pressure Induced Frequency Fluctuations in Silicon MEMS Resonators. Journal of Microelectromechanical Systems. p. 1-6. |
Abstract: | Silicon MEMS resonators are increasingly being adopted for applications in timing and frequency control, as well as precision sensing. It is well established that a key limitation to performance is associated with sensitivity to environmental variables such as temperature and pressure. As a result, technical approaches to address these factors such as vacuum sealing and ovenization of the resonators in a temperature controlled system have been introduced. However, residual sensitivity to such effects can still serve as a significant source of frequency fluctuations and drift in precision devices. This is experimentally demonstrated in this paper for a precision oven-controlled and vacuum-sealed silicon resonators. The frequency fluctuations of oscillators constructed using two separate nearly-identical co-located resonators on the same chip are analysed and differential frequency fluctuations are examined as a means of reducing the impact of common-mode effects such as temperature and pressure. For this configuration, our results show that the mismatch of temperature and pressure coefficients between the resonators ultimately limits the frequency stability. |
URI: | https://hdl.handle.net/20.500.11779/1494 https://doi.org/10.1109/JMEMS.2021.3077633 |
ISSN: | 1057-7157 1941-0158 |
Appears in Collections: | Elektrik Elektronik Mühendisliği Bölümü Koleksiyonu Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection |
Files in This Item:
File | Description | Size | Format | |
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09439061.pdf Until 2040-01-01 | Full Text - Article | 1.96 MB | Adobe PDF | View/Open |
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